UV-KUB 3 Compact High-Precision UV-LED Mask Aligner
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Whereas standard ChipShop connectors only accept soft-walled tubing, this set of connectors allows connecting any 1/16" OD rigid tubing to a ChipShop chip.
Suitable for rigid tubing (PTFE, PEEK, etc.) with an OD of 1/16" (1.6 mm). Manufactured in blue TPE, max. pressure of 3.2 bar with a 1/16" OD PEEK tubing.
Plugs to block unused ports are also available in our shop.
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The UV-KUB 2 is the first UV-LED masking system available internationally, setting a new standard for precision and efficiency in photolithography. Available in 4" or 6" versions, this compact system is equipped with a high-performance LED-based optical head that delivers collimated and homogeneous illumination.
Its masking function ensures resolutions as fine as 2 µm, making it ideal for the fabrication of microfluidic devices, integrated optical circuits, and surface microstructuring.
Compatible with popular photoresists like AZ, Shipley, Kayaku SU-8, Kemlab Hare SQ, and K-CL series, the UV-KUB 2 is designed to excel in laboratory and clean-room environments.

| Resolution | 2 µm |
| Wavelength | 365 nm ± 5 nm |
| Power density | 35 mW/cm² ± 10% |
| Max wafer size | 4" or 6" |
| Max total thickness | 2 mm |
| Contact | Hard (physical) or Soft (proximity) |
| Substrate warm-up | < 1°C during exposure |
| Exposure cycle | 1 second to 1 hour |
| Programmable cycles | Up to 10 |
| Dimensions | 260 x 260 x 260 mm |
| Weight | 8.2 kg (18 lbs) |
| Touchscreen | 5.7-inch color interface with stylus |
| Power supply | 100V/240V - 50Hz/60Hz |
| Power consumption | 180 W |
UV-KUB 3 Compact High-Precision UV-LED Mask Aligner
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